1. Pre-Diffusion Cleaning
| NH4OH /H202 |
QDR | HF | QDR | HCI /HO2 |
QDR | FR | SD |
2. Si3 N4 Etching
| H3PO4 | H3PO4 | QDR | FR | SD |
3. Photoresist Stripping
| H2SO4 /H2O2 |
H2SO4 /H2O2 |
QDR | FR | SD |
4. Buffered Oxide Etching (BOE)
| HF | QDR | FR | SD |
5. HF Cleaning
| HR | QDR | QDR | FR | SD |